Polymer Grating: SEM imaging
Scanning Electron Microscopy image from a cross-sectioned polymer grating
Description:
Scanning Electron Microscopy (SEM) imaging of a cross-sectioned polymer grating structure for assessment of the grating pitch, sidewall profile and structure uniformity & reproducibility (Copyright QinetiQ)
Industry Sectors:
Semiconductor, Photonics/Optoelectronics, Optics
Techniques:
Scanning Electron Microscopy
Keywords:
diffraction grating, polymer