Ferroelectric Thin Film: Vibrometry characterisation
Laser Doppler Vibrometry analysis of out of plane motion of actuated ferroelectric thin film
Description:
Laser Doppler Vibrometry is used to measure the piezoelectric coefficient of ferroelectric (functional) thin films. Ferroelectric thin films are used extensively in sensors, actuators and MEMS devices (copyright NPL).
Industry Sectors:
MicroSystems/MEMS, Printing and Displays
Techniques:
Vibrometry
Keywords:
thin films, MEMS