AFM cantilevers: vibrometry characterisation
In-plane displacement characteristics of a V shaped AFM cantilever obtained using Laser Doppler Vibrometry
Description:
Laser Doppler Vibrometry is can identify the resonant frequencies, and in and out of plane motion of AFM cantilevers. The technique can be used to identify which high order resonance modes are excited in cantilevers. High order harmonic resonances can offer increased sensitivity to materials properties and are now being employed in novel AFM imaging modes (Copyright NPL).
Industry Sectors:
MicroSystems/MEMS
Techniques:
Vibrometry
Keywords:
dynamic measurements, AFM