X-ray Reflectometry
| X-ray Reflectivity (XRR) is a valuable method for the characterisation of thin surface films and multi-layers. The technique exploits the total external reflection of X-rays occurring at grazing angles from flat surfaces. Surface layers give rise to interference fringes which can be modelled to give the absolute layer thickness, down to the nanometre level, as well as layer density information. The technique requires macroscopic substrate flatness and low roughness but unlike XRD does not require crystalline samples. |
Key Information
- Analysis Area: 1-10mm
- Film thickness range: 1-100 nanometres
- Film thickness (absolute)
- Interface roughness
- Layer density
Common Applications
- Single and multilayer thin film thickness on substrates
- Measurement of thin and ultrathin deposited or reacted surface layers
CEMMNT Benefits