Vibrometry
Laser Doppler Vibrometry (LDV) is a non-invasive method used to obtain both in- and out-of-plane vibrational information. It is commonly used to characterise in-situ performance of MEMS and Microsystems
LDV works using optical interference. The Doppler shift of a laser reflected from a vibrating area, is detected. This then gives the velocity of that region along the axis of the laser light. The laser can be scanned laterally to map vibration and displacement modes.
LDV works using optical interference. The Doppler shift of a laser reflected from a vibrating area, is detected. This then gives the velocity of that region along the axis of the laser light. The laser can be scanned laterally to map vibration and displacement modes.
In-plane displacement characteristics of a V shaped AFM cantilever obtained using Laser Doppler Vibrometry (Data Courtesy NPL)
Key Information
- Resonant frequency
- In-plane motion
- Out of plane motion
- Transient response
- Displacement resolution < 5 nm
- Spatial resolution: 1 micron
- Frequency range: 0 – 2 MHz
Common Applications
- MEMS
- Microsystems
CEMMNT Benefits
Application Notes
