Stylus profilometry simultaneously measures form, dimension, texture and step height. A diamond stylus is traversed across the component or surface under test. Undulations in the surface and the overall shape are traced by the stylus and digitized to provide a 2 or 3 dimensional surface map. Stylus profiometry can scan long areas with Angstrom vertical resolution. Advances in tip technology and staging allow steep sided surfaces to be accurately profiled.

Wafer Roughness Profile

• Roughness
• Waviness
• Form
• Contour
• Step height
• Sag
• Scan Length: 200mm
• X resolution: dependant on stylus radius
• Z Range: 12.5mm
• Z Resolution: 0.8nm

Contour Profile

• Step height measurement
• Trench depth and width
• Aspheric and diffractrive optics profiling
• Automotive components.
• Medical devices
• Turbine blades
• Deviation of prescribed form relative to mathematical templates.
• Generation of error profiles and sag tables relative to optical prescriptions.

Aspheric Lens Raw Profile