Dynamic MEMS Profilometry (DMEMS) strobes and synchronises the light source of an interferometric optical profiler to acquire 3-D images of MEMS devices at each stage in their motion cycle. In addition to generating movies of device motion, both in and out of plane performance can be determined. Both packaged and unpackaged devices can be characterised. It is a key tool for characterising MEMS devices at each fabrication stage. Hence, device failures can be identified at early process stages saving time and money. DMEMS can be used with temperature stages and vacuum chambers to characterise MEMS properties as a function of temperature and pressure. DMEMS is one of a CEMMNT's comprehensive range of MEMS testing tools and complements dynamic analysis by vibrometry.

In-plane resonant SOI MEMS device