CEMMNT partner, NPL, has won a Joint Industry Project in collaboration with Michelson Diagnostics, QinetiQ, GE Sensing and Olympus. The project entitled "The application & development of new techniques for the measurement of internal structure and thickness of MEMS devices" will investigate various IR Tomography techniques for measuring MEMS structures. The resolution of the instruments will be determined and a feasibility study will be conducted to examine their use as in-line tools. Structures that will be measured include MEMS pressure sensors, other membranes and wafers.