Metrology is critical at each stage of product manufacture. Pure wafers need to be characterised for roughness, bow, crystallinity and sub-surface defects. Subsequent deposition, etching, masking and micromachining processes all require metrology to measure not just the critical dimensions of structures but a range of materials properties from stress through to electrical, thermal and mechanical characteristics.

CEMMNT partners QinetiQ, Taylor Hobson and National Physical Laboratory are ideally positioned to comprehensively address all metrology requirements, combining state of the art equipment in clean-rooms with proven rapid response problem solving expertise.

Crystal growth of AlGaN on GaN, AFM