Industry Sectors
Photonics/Optoelectronics

Our 3D metrology tools characterise the performance of optoelectronic devices and their components. Chemical, elemental and depth profiling is used in both R&D and failure analysis. New organic and inorganic display materials can be characterised at the nanoscale using a combination of atomic force and spectroscopic techniques.
 
Metrology is key in device fabrication from characterising quality of wafers and polymer substrates, to multi-layer films, passivation layers and device interconnects. Trace dopants, contaminants and defects can be both identified and characterised.

Utilising the expertise of our industry leading partners, we can drive both new product innovation and characterisation of existing products.

Photonics/Optoelectronics
Microlens array: optical profilometry

Core Design, Measurement and Characterisation Capabilities
3D metrology of optoelectronic/photonic structures
Layer and thin film thickness and composition
Chemical and elemental mapping
Dopant type and distribution
Stress measurement
Electrical and thermal property characterisation
 
Key Techniques
Scanning Electron Microscopy
Transmission Electron Microscopy
Energy Dispersive X-ray Analysis
Atomic Force Microscopy
Optical Profilometry
Stylus Profilometry
Secondary Ion Mass Spectrometry
X-ray Photoelectron Spectroscopy
X-ray Diffraction
X-ray Topography
X-ray Reflectometry
Fourier Transform Infra-red spectroscopy
Micro Raman Spectroscopy
Ellipsometry
Spectrophotometry
Thermal Imaging
                                                                                                                                                                 Oxygen contamination depth profile in VCSEL device