Metrology is crucial for not just MEMS innovation but in identifying defects at early process stages to minimise wastage costs. Our partners provide world-class design, measurement and characterisation expertise for MEMS, MicroSystems and MicroFluidics. From providing open access to CoventorWare design and simulation tools to clean room metrology and characterisation, we can add value at each stage of the device life-cycle.

Our metrology solutions range from initial wafer level analysis to a range of approaches for dynamic characterisation of packaged and unpackaged final devices. Thin films, passivation layers and contaminants can all be characterised. Our expertise extends to analysis of key structural mechanical, thermal and electrical properties.